Modelling of resolution enhancement processes in lithography

Modelling of Resolution Enhancement Processes in Lithography - Microelectronics, 1995. Proceedings., 1995 20th International Conference on

This paper describes the modelling and simulation of two resolution enhancement techniques in lithography ; 1) phase shift mask (PSM) technology and 2) top surface imaging (TSI) with silylation and dry development. The effect of the duty ratio on the image contrast is computed. Simulated one and two dimensional rim shifters and attenuated PSMs are presented. The effect of the aerial image on th...

TCAD development for lithography resolution enhancement

Advances in lithography have contributed significantly to the advancement of the integrated circuit technology. While nonoptical next-generation lithography (NGL) solutions are being developed, optical lithography continues to be the workhorse for high-throughput very-large-scale integrated (VLSI) lithography. Extending optical lithography to the resolution levels necessary to support today’s a...

Resolution enhancement optimization methods in optical lithography with improved manufacturability

Discriminative resolution enhancement in acoustic modelling

The accuracy of the acoustic models in large vocabulary recognition systems can be improved by increasing the resolution in the acoustic feature space. This can be obtained by increasing the number of gaussian densities in the models by splitting of the gaussians. This paper proposes a novel algorithm for this splitting operation. It is based on the phonetic decision tree used for the state tyi...

Resolution enhancement of colored images by inverse diffusion processes

Algorithms for resolution enhancement are needed in various applications of image processing and communication such as compression, and HDTV. We develop a geometrical algorithm, based on diffusion processes which are used both for smoothing of colored images and enhancement of the colored images. The latter is accomplished by \solving" an inverse diffusion problem which is ill posed. In order t...